3D-Printed Ceramics | Case Study Gas Injector

3D-printed technical ceramics: From assembled multi-parts to single integrated components

Additive manufacturing of technical ceramics enables a shift from multi-part assemblies to fully integrated components. A ceramic gas injector used in semiconductor etching processes demonstrates this approach. 

Originally designed as a two-part assembly, the injector was redesigned as a monolithic component using ceramic 3D printing. It integrates multiple internal channels, a flow-optimized structure, and 62 outlet openings in a single part. This eliminates interfaces, reduces leakage risks, and simplifies assembly. At the same time, the optimized internal geometry enables more uniform gas distribution, contributing to stable and reproducible process conditions. The example shows how 3D-printed ceramic components can improve reliability and enable new design approaches in semiconductor equipment.

👉 Read the full case study: Cleaner semiconductor etching: integrated ceramic AM gas injector