Name
Bruker Nano GmbH
What We Do
Bruker delivers cutting-edge metrology solutions for the challenging demands of the semiconductor
industry. Advanced automation systems and rapid, non-contact analysis tools facilitate applied materials
research and process control in semiconductor manufacturing.
Discover a comprehensive spectrum of solutions ranging from x-ray technology, AFM, and Stylus Profiling
to Nano-Indentation, WLI, Ellipsometry, and nanoscale IR spectroscopy.
Applications include critical dimension metrology, the nanoscale characterization of electrical, mechanical,
and chemical properties, failure analysis and defect detection in wafer production, post-CMP and post-etch
processes, and C-S thin films and multi-layer thin film characterization.
Empowering semiconductor excellence with proven metrology solutions.
industry. Advanced automation systems and rapid, non-contact analysis tools facilitate applied materials
research and process control in semiconductor manufacturing.
Discover a comprehensive spectrum of solutions ranging from x-ray technology, AFM, and Stylus Profiling
to Nano-Indentation, WLI, Ellipsometry, and nanoscale IR spectroscopy.
Applications include critical dimension metrology, the nanoscale characterization of electrical, mechanical,
and chemical properties, failure analysis and defect detection in wafer production, post-CMP and post-etch
processes, and C-S thin films and multi-layer thin film characterization.
Empowering semiconductor excellence with proven metrology solutions.
Website
Categories (50)
Defect; Particle; Bump; Contamination Detection, Review or Inspection, Film Thickness; Thickness; Uniformity Measurement; Ellipsometer, Instruments; Bench Top Test, Line Width; Critical Dimension (CD) Measurement, Microscopes: Atomic Force Microscopes (AFM), Microscopes: Confocal Scanning Microscope; 3-D Video Microscopes, Microscopes: Optical Microscopes, Overlay Measurement, Spectrometers; FTIR; ATR-FTIR; Auger Electron (AES); SIMS, Stress; Refractive Index; Reflectivity & Conductivity Measurement, Thermal Sensing, Measurement, Analysis, Wafer; Substrate Metrology; Topology; Nanotopography; Flatness Measurement; Crystalline Orientation, Equipment, Nanotechnology Tools, Inspection and Metrology, Failure Analysis Systems, Optical Test Systems, Parametric Test Systems, Probing Equipment incl. Analytical; Circuit; Manual; E-Beam; Optical; Wafer Probers, Process Monitoring systems, Measurement and Control Technology, Failure Analysis and other Analytical Services, Measurement; Inspection Service, Laboratory Apparatus and Supplies
Phone
+49 30 670990 7500
Address
Am Studio 2D
Berlin, 12489
Germany
Berlin, 12489
Germany