Brooks Instrument GmbH

Brooks Instrument GmbH

Brooks Instrument is a company of highly trained specialists with service locations world-wide. We work in close cooperation with international end users and are default at most of the global operating OEMs.

Our precision process instrumentation for flow, vacuum and pressure applications is focused on semiconductor manufacturing.

Brooks Instrument GmbH is your partner for semiconductor manufacturing in the heart of Europe. A dedicated sales team will help you to select the optimal solutions for your measurement or control needs and provide you the optimal services.

PV: Cells, PV: Modules, Liquid Crystal Injection or Filling Equipment, Repair; Rework Equipment, Coat; Develop; Resist Processing; Track Equipment , Crystal Growing & Machining Equipment , Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD, Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment , Epitaxy Equipment; Epi Reactors; Molecular Beam Epitaxy (MBE); Atomic Layer Epitaxy (ALE), Etching; Stripping; Ashing - Dry and Wet Equipment , Ion; E-Beam Milling Etching Equipment, Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment , Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's, Sensors, Gas; Liquid delivery panels as subsystems, Chemical; Pure Water; Fluid Handling; Storage; Supply Systems, Gas Handling - Cabinets; Control; Supply Systems, Gas Monitoring Equipment; RGA's; TGO compliance , Process Controls