Name
ASML Netherlands BV
What We Do
We measure a machine’s life in decades, not years. Almost every single ASML lithography system sold is still in use at a customer fab.Before EUV, before immersion, and even before our TWINSCAN systems, there was the PAS.
In 1991, seven years after ASML was founded, we launched the PAS 5500, which turned out to be our breakthrough platform. This system was able to dramatically reduce manufacturing times for our customers, and its modular design enabled them to produce multiple generations of advanced chips using the same system.
The PAS 5500 is a versatile machine that can be adapted for many new markets and special applications. For example, by adding front-to-backside alignment, the system can be optimized for MEMS chips such as accelerators (the chips that can tell which way is ‘up’). The system can also be adapted for ‘through-silicon via’ (TSV) applications, radio frequency chips, thin-film heads for hard disk drives, or bowed wafer handling for LED applications. Enhancements to throughput and overlay can also reduce costs in high-volume manufacturing.
Read more about our PAS 5500 Platform here.
Contact Us: edwin.schoenmakers@asml.com
In 1991, seven years after ASML was founded, we launched the PAS 5500, which turned out to be our breakthrough platform. This system was able to dramatically reduce manufacturing times for our customers, and its modular design enabled them to produce multiple generations of advanced chips using the same system.
The PAS 5500 is a versatile machine that can be adapted for many new markets and special applications. For example, by adding front-to-backside alignment, the system can be optimized for MEMS chips such as accelerators (the chips that can tell which way is ‘up’). The system can also be adapted for ‘through-silicon via’ (TSV) applications, radio frequency chips, thin-film heads for hard disk drives, or bowed wafer handling for LED applications. Enhancements to throughput and overlay can also reduce costs in high-volume manufacturing.
Read more about our PAS 5500 Platform here.
Contact Us: edwin.schoenmakers@asml.com
Website
Categories (50)
Equipment, Nanotechnology Tools, Inspection and Metrology, Thin Film, Wafers, Lithography; Exposure; Aligners; Direct Write Systems; Steppers; Scanners; Nanoimprint, Functional Test Systems, Handlers; Positioner Systems, Thin Film; Dielectric Film Materials, Mask and Reticle Handling Products, Transfer lithography masks; Polymer masks; templates (for Nanoimprint), Compound Semiconductor substrates (GaAs on Silicon; GaN; InP; SiGe, etc.), Gallium Arsenide (GaAs); Sapphire Substrates, Silicon on Insulator (SOI); Silicon on Sapphire (SOS); Silicon Carbide;, Lamps for Lithography, Sensors, Cameras - Still; CCD; Video & Monitors, Power Supplies; RF Generators; Converters; Electrical Conditioning, Yield Mgmt; Process Control Software, Lithography; Patterning service, Reclaim Services, Repair; Rebuild; Install Equipment; Maintenance Services; Spare Parts, Used; Rental Equipment; Inventory Reduction, Appraisal - Brokers; Resellers, Equipment; Hardware; Product Design, Integration and Manufacturing, Wafer Fab Operations and Design, Wafer Handling, Tools, Device Manufacturing: Semiconductor, Components: Low Power Electronics, Components: Flexible Electronics, Components: IC's, Components: IDM / Foundries, Components: Sensors, Design: Fabless, Energy Efficiency: Low Power Electronics, Energy Efficiency: Power electronics, Energy Efficiency: Power Supplies and Batteries, Healthcare: Device Implants, Healthcare: Flexible Intelligent Devices, Healthcare: sensors, Imaging: Camera and Camera Modules, Imaging: CCD, CMOS and organic sensors, Imaging: Image Processing, Software and System, Lighting: OLED
Phone
+31-140-268-3000
Address
De Run 6501
Veldhoven, NL-5504 DR
Netherlands
Veldhoven, NL-5504 DR
Netherlands